Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator

Chido Celine Chogugudza; Yan-Ning Fang; Zi-Hui Zhu

doi:doi:10.11648/j.ijmea.20241204.11

Research Article |

| Peer-Reviewed

Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator

Chido Celine Chogugudza^*

, Yan-Ning Fang

, Zi-Hui Zhu

Published in International Journal of Mechanical Engineering and Applications (Volume 12, Issue 4)

Received: 19 May 2024 Accepted: 30 May 2024 Published: 6 September 2024

Views: Downloads:

Download PDF

Share This Article

Twitter
Linked In
Facebook

Abstract

Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.

Published in	International Journal of Mechanical Engineering and Applications (Volume 12, Issue 4)
DOI	10.11648/j.ijmea.20241204.11
Page(s)	81-99
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2024. Published by Science Publishing Group

Keywords

Nanopositioning Stage, Normal Stressed Electromagnetic Actuator, Bridge-Type Distributed Compliant Mechanism, Long Range Motion

References

[1]	A. Yacoot et al., “Design and performance of a test rig for evaluation of nanopositioning stages,” vol. 30, no. 3, p. 035002, 2019. https://doi.org/10.1088/1361-6501/aafd03
[2]	S. Iqbal, A. J. S. Malik, and A. A. Physical, “A review on MEMS-based micro displacement amplification mechanisms,” vol. 300, p. 111666, 2019. https://doi.org/10.1016/j.sna.2019.111666
[3]	Q. Xu, Y. J. M. Li, and m. theory, “Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier,” vol. 46, no. 2, pp. 183-200, 2011. https://doi.org/10.1016/j.mechmachtheory.2010.09.007
[4]	W.-W. Huang, L. Li, Z. Zhu, L.-M. J. M. S. Zhu, and S. Processing, “Modeling, design and control of normal-stressed electromagnetic actuated fast tool servos,” vol. 178, p. 109304, 2022. https://doi.org/10.1016/j.ymssp.2022.109304
[5]	L.-J. Lai and X.-Q. Yin, “Analysis of Bridge-type Distributed-compliance Mechanism,” in MATEC Web of Conferences, 2018, vol. 213, p. 01005: EDP Sciences. https://doi.org/10.1051/matecconf/201821301005
[6]	W.-L. Zhu et al., “Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nanopositioning,” vol. 25, no. 11, p. 115033, 2016. https://doi.org/10.1088/0964-1726/25/11/115033
[7]	D. Wu, X. Xie, and S. J. I. T. o. M. Zhou, “Design of a normal stress electromagnetic fast linear actuator,” vol. 46, no. 4, pp. 1007-1014, 2009. https://doi.org/10.1109/TMAG.2009.2036606
[8]	Z. Zhou, Y. Gao, L. Sun, W. Dong, and Z. J. M. S. Du, “A bistable mechanism with linear negative stiffness and large in-plane lateral stiffness: design, modeling and case studies,” vol. 11, no. 1, pp. 75-89, 2020. https://doi.org/10.5194/ms-11-75-2020, 2020.
[9]	M. Ling, J. Cao, M. Zeng, J. Lin, D. J. J. S. M. Inman, and Structures, “Enhanced mathematical modeling of the displacement amplification ratio for piezoelectric compliant mechanisms,” vol. 25, no. 7, p. 075022, 2016. https://doi.org/10.1088/0964-1726/25/7/075022
[10]	J.-L. Ha, Y.-S. Kung, S.-C. Hu, R.-F. J. S. Fung, and A. A. Physical, “Optimal design of a micro-positioning Scott-Russell mechanism by Taguchi method,” vol. 125, no. 2, pp. 565-572, 2006. https://doi.org/10.1016/j.sna.2005.06.025
[11]	G. Haertling, “Compositional study of PLZT Rainbow ceramics for piezo actuators,” in Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics, 1994, pp. 313-318: IEEE. https://doi.org/10.1109/ISAF.1994.522366
[12]	J. Ueda, T. W. Secord, and H. H. J. I. A. t. o. m. Asada, “Large effective-strain piezoelectric actuators using nested cellular architecture with exponential strain amplification mechanisms,” vol. 15, no. 5, pp. 770-782, 2009. https://doi.org/10.1109/TMECH.2009.2034973
[13]	C. Lin, Z. Shen, Z. Wu, J. J. S. Yu, and A. A. Physical, “Kinematic characteristic analysis of a micro-/nano positioning stage based on bridge-type amplifier,” vol. 271, pp. 230-242, 2018. https://doi.org/10.1016/j.sna.2017.12.030
[14]	M. Ling, J. Wang, M. Wu, L. Cao, B. J. S. Fu, and A. A. Physical, “Design and modeling of an improved bridge-type compliant mechanism with its application for hydraulic piezo-valves,” vol. 324, p. 112687, 2021. https://doi.org/10.1016/j.sna.2021.112687
[15]	S. Polit and J. J. I. A. T. o. m. Dong, “Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing,” vol. 16, no. 4, pp. 724-733, 2010. https://doi.org/10.1109/TMECH.2010.2052107
[16]	P. Huang, X. Wu, S. To, L. Zhu, Z. J. I. J. o. M. T. Zhu, and Manufacture, “Deterioration of form accuracy induced by servo dynamics errors and real-time compensation for slow tool servo diamond turning of complex-shaped optics,” vol. 154, p. 103556, 2020. https://doi.org/10.1016/j.ijmachtools.2020.103556
[17]	S. Jin and X. Wang, “Rotating Electromagnetic Actuator with Magnetic Fluid,” in Journal of Physics: Conference Series, 2022, vol. 2183, no. 1, p. 012006: IOP Publishing. https://doi.org/10.1088/1742-6596/2183/1/012006
[18]	L. Chen et al., “A novel compliant nanopositioning stage driven by a normal-stressed electromagnetic actuator,” vol. 19, no. 4, pp. 3039-3048, 2021. https://doi.org/10.1109/TASE.2021.3105683
[19]	N. Lobontiu, E. J. C. Garcia, and structures, “Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms,” vol. 81, no. 32, pp. 2797-2810, 2003. https://doi.org/10.1016/j.compstruc.2003.07.003
[20]	P. Liu, P. J. M. Yan, and M. Theory, “A new model analysis approach for bridge-type amplifiers supporting nano-stage design,” vol. 99, pp. 176-188, 2016. https://doi.org/10.1016/j.mechmachtheory.2016.01.005
[21]	J. Kim and J. J. I. T. o. M. Chang, “A new electromagnetic linear actuator for quick latching,” vol. 43, no. 4, pp. 1849-1852, 2007. https://doi.org/10.1109/TMAG.2006.892289
[22]	Q. Zhang, J. Zhao, X. Shen, Q. Xiao, J. Huang, and Y. J. M. Wang, “Design, modeling, and testing of a novel xy piezo-actuated compliant micro-positioning stage,” vol. 10, no. 9, p. 581, 2019. https://doi.org/10.3390/mi10090581
[23]	H.-W. Ma, S.-M. Yao, L.-Q. Wang, Z. J. S. Zhong, and A. A. Physical, “Analysis of the displacement amplification ratio of bridge-type flexure hinge,” vol. 132, no. 2, pp. 730-736, 2006. https://doi.org/10.1016/j.sna.2005.12.028
[24]	W. Huang, J. Lian, M. Chen, and D. J. M. An, “Bidirectional active piezoelectric actuator based on optimized bridge-type amplifier,” vol. 12, no. 9, p. 1013, 2021. https://doi.org/10.3390/mi12091013
[25]	J. H. Kim, S. H. Kim, Y. K. J. S. Kwak, and A. A. Physical, “Development and optimization of 3-D bridge-type hinge mechanisms,” vol. 116, no. 3, pp. 530-538, 2004. https://doi.org/10.1016/j.sna.2004.05.027
[26]	Y. Koseki, T. Tanikawa, N. Koyachi, and T. J. A. R. Arai, “Kinematic analysis of a translational 3-dof micro-parallel mechanism using the matrix method,” vol. 16, no. 3, pp. 251-264, 2002. https://doi.org/10.1163/156855302760121927
[27]	K.-q. Qi, Y. Xiang, C. Fang, Y. Zhang, C.-s. J. M. Yu, and M. Theory, “Analysis of the displacement amplification ratio of bridge-type mechanism,” vol. 87, pp. 45-56, 2015. https://doi.org/10.1016/j.mechmachtheory.2014.12.013
[28]	S. Xiao and Y. J. I. T. o. I. E. Li, “Optimal Design, Fabrication, and Control of an $ XY $ Micropositioning Stage Driven by Electromagnetic Actuators,” vol. 60, no. 10, pp. 4613-4626, 2012. https://doi.org/10.1109/TIE.2012.2209613
[29]	X. Wang et al., “Design, modeling, and test of a normal-stressed electromagnetic actuated compliant nanopositioning stage,” vol. 185, p. 109753, 2023. https://doi.org/10.1016/j.ymssp.2022.109753
[30]	B. Ding, Z.-X. Yang, G. Zhang, and X. J. A. i. M. E. Xiao, “Optimum design and analysis of flexure-based mechanism for non-circular diamond turning operation,” vol. 9, no. 12, p. 1687814017743353, 2017. https://doi.org/10.1177/1687814017743353
[31]	X. Huang, X. Liu, J. Sun, Z. Zhang, H. J. J. o. S. Hua, and vibration, “Vibration isolation characteristics of a nonlinear isolator using Euler buckled beam as negative stiffness corrector: a theoretical and experimental study,” vol. 333, no. 4, pp. 1132-1148, 2014. https://doi.org/10.1016/j.jsv.2013.10.026
[32]	W. Dong et al., “Development of a highly efficient bridge-type mechanism based on negative stiffness,” vol. 26, no. 9, p. 095053, 2017. https://doi.org/10.1088/1361-665X/aa8102
[33]	K. Hoetmer, G. Woo, C. Kim, and J. Herder, “Negative stiffness building blocks for statically balanced compliant mechanisms: design and testing,” 2010. https://doi.org/10.1115/1.4002247
[34]	D. Corne and M. A. Lones, “Evolutionary algorithms,” in Handbook of Heuristics: Springer, 2018, pp. 409-430. https://doi.org/10.1007/978-3-319-07153-4_27-1

Cite This Article

Plain Text BibTeX RIS

APA Style

Chogugudza, C. C., Fang, Y., Zhu, Z. (2024). Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. International Journal of Mechanical Engineering and Applications, 12(4), 81-99. https://doi.org/10.11648/j.ijmea.20241204.11

Copy | Download

ACS Style

Chogugudza, C. C.; Fang, Y.; Zhu, Z. Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. Int. J. Mech. Eng. Appl. 2024, 12(4), 81-99. doi: 10.11648/j.ijmea.20241204.11

Copy | Download

AMA Style

Chogugudza CC, Fang Y, Zhu Z. Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. Int J Mech Eng Appl. 2024;12(4):81-99. doi: 10.11648/j.ijmea.20241204.11

Copy | Download

@article{10.11648/j.ijmea.20241204.11,
  author = {Chido Celine Chogugudza and Yan-Ning Fang and Zi-Hui Zhu},
  title = {Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator
},
  journal = {International Journal of Mechanical Engineering and Applications},
  volume = {12},
  number = {4},
  pages = {81-99},
  doi = {10.11648/j.ijmea.20241204.11},
  url = {https://doi.org/10.11648/j.ijmea.20241204.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmea.20241204.11},
  abstract = {Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.
},
 year = {2024}
}

Copy | Download

TY  - JOUR
T1  - Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator

AU  - Chido Celine Chogugudza
AU  - Yan-Ning Fang
AU  - Zi-Hui Zhu
Y1  - 2024/09/06
PY  - 2024
N1  - https://doi.org/10.11648/j.ijmea.20241204.11
DO  - 10.11648/j.ijmea.20241204.11
T2  - International Journal of Mechanical Engineering and Applications
JF  - International Journal of Mechanical Engineering and Applications
JO  - International Journal of Mechanical Engineering and Applications
SP  - 81
EP  - 99
PB  - Science Publishing Group
SN  - 2330-0248
UR  - https://doi.org/10.11648/j.ijmea.20241204.11
AB  - Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.

VL  - 12
IS  - 4
ER  -

Copy | Download

Author Information

Chido Celine Chogugudza

Department of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

Contact Email

http://orcid.org/0009-0006-1530-288X
Yan-Ning Fang

Department of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

Contact Email

http://orcid.org/0000-0001-8412-6978
Zi-Hui Zhu

Department of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

Contact Email

http://orcid.org/0000-0002-0491-4307

Download PDF

Sections

Plain Text BibTeX RIS

APA Style

Chogugudza, C. C., Fang, Y., Zhu, Z. (2024). Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. International Journal of Mechanical Engineering and Applications, 12(4), 81-99. https://doi.org/10.11648/j.ijmea.20241204.11

Copy | Download

ACS Style

Chogugudza, C. C.; Fang, Y.; Zhu, Z. Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. Int. J. Mech. Eng. Appl. 2024, 12(4), 81-99. doi: 10.11648/j.ijmea.20241204.11

Copy | Download

AMA Style

Chogugudza CC, Fang Y, Zhu Z. Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator. Int J Mech Eng Appl. 2024;12(4):81-99. doi: 10.11648/j.ijmea.20241204.11

Copy | Download

@article{10.11648/j.ijmea.20241204.11,
  author = {Chido Celine Chogugudza and Yan-Ning Fang and Zi-Hui Zhu},
  title = {Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator
},
  journal = {International Journal of Mechanical Engineering and Applications},
  volume = {12},
  number = {4},
  pages = {81-99},
  doi = {10.11648/j.ijmea.20241204.11},
  url = {https://doi.org/10.11648/j.ijmea.20241204.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmea.20241204.11},
  abstract = {Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.
},
 year = {2024}
}

Copy | Download

TY  - JOUR
T1  - Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator

AU  - Chido Celine Chogugudza
AU  - Yan-Ning Fang
AU  - Zi-Hui Zhu
Y1  - 2024/09/06
PY  - 2024
N1  - https://doi.org/10.11648/j.ijmea.20241204.11
DO  - 10.11648/j.ijmea.20241204.11
T2  - International Journal of Mechanical Engineering and Applications
JF  - International Journal of Mechanical Engineering and Applications
JO  - International Journal of Mechanical Engineering and Applications
SP  - 81
EP  - 99
PB  - Science Publishing Group
SN  - 2330-0248
UR  - https://doi.org/10.11648/j.ijmea.20241204.11
AB  - Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.

VL  - 12
IS  - 4
ER  -

Copy | Download